Institute of Electrical Engineering,Chinese Academy of Sciences


NameGuangrong Fang Date of Birth1953/11/24   
SexMale  Degreebachelor 
Place of Birth  Professional TitleSenior Engineer 
Tel86-10-82547181  Administrative Title 
Fax010- 82547174 
Research Directions:The key technologies in microelectronic equipment¡ª Electron-beam lithographic technology and and Nano pattern generators system.
Education and Work Experiences:March,1973¡ªSept,1974 Fangzhongcun,Wangfu Town,Chunan County,Province of Zhejiang,China
Oct.,1974¡ªNov.,1977 The University of Science and Technology of China (USTC)
Dec.,1977¡ªNow Institute of Electrical Engineering Chinese Acadmy of Sciences
Projects:National Key Technologies important R&D projects, Study on DY3 Scaning electron beam lithographic machine, during the period of 6th Five-Year Plans,
National Key Technologies important R&D projects, Study on DJ2 variable-shaped electron beam lithographic machine,during the period of 7th Five-Year Plans,
The important R&D projects of CAS, Study on Micron electron beam lithography system, during the period of the 8th Five-Year Plan.
The important intellectual innovation projects of CAS, Study on Nano Electron Beam Projection lithographic system and Study on Practical Application of Nano electron Beam lithographic system and Nano pattern generators system.
Awards:¡°Micron electron beam lithography system ¡± has won second prize of Scientific and Technological Progress Award issued by CAS. 1997 year